Project Description
Microelectromechanical Systems (MEMS)
Project period: 01/2015 - 04/2017
This project aims to develop a hybrid piezoelectric/electrostatic MEMS mirror and control technology for application in a miniaturized medical optical coherence tomography (OCT) system. The project is divided among the three partners according to specialty. Preciseley will design the MEMS devices, oversee the manufacture of electrostatic MEMS wafers, develop the packaging technology, and build a demonstrator. EDC will develop and manufacture the custom matched ASIC enabling piezoelectric actuation and positional feedback. ENAS will continue piezoelectric materials development, build a piezoelectric scanning demonstrator, and integrate piezoelectric materials with the hybrid OCT scanner.
Preciseley Microtechnology Corporation
Location: Edmonton, Canada
Founded: 2006
Products: Key components for augmented reality devices
Electronic Design Chemnitz GmbH (EDC)
Location: Chemnitz, Germany
Founded: 2008
Products: electronic systems/chip manufacturing
Fraunhofer Institute for Electronic Nano Systems (ENAS)
Location: Chemnitz, Germany